The invention discloses a lifting system of a wafer bearing seat. The lifting system comprises a supporting cavity, a sliding block, a driving rod and a sliding supporting piece. Wherein the supporting chamber is positioned below the wafer reaction chamber and is connected with the wafer reaction chamber; the sliding block is located in the supporting chamber, ascends or descends along the supporting chamber, is connected with a wafer bearing seat in the wafer reaction chamber and is used for driving the wafer bearing seat to ascend or descend in the wafer reaction chamber; the driving rod is connected with the sliding block and used for driving the sliding block to ascend or descend. The sliding supporting piece is located between the sliding block and the supporting cavity and used for supporting the sliding block to slide in the supporting cavity, and random force borne by the sliding block is balanced through the sliding supporting piece. The lifting system of the wafer bearing seat provided by the invention solves the problems of unstable structure of the lifting device, deformation of the lead screw and the like caused by random force generated by the corrugated pipe.
本发明公开了一种晶圆承载座的升降系统,包括支撑腔室、滑块、驱动杆以及滑动支撑件;其中,所述支撑腔室位于晶圆反应腔室的下方且与晶圆反应腔室连接;所述滑块位于支撑腔室的内部、沿支撑腔室升高或降低,并且与晶圆反应腔室中的晶圆承载座连接,用于带动所述晶圆承载座在晶圆反应腔室内升高或降低;所述驱动杆与滑块连接,用于驱动所述滑块升高或降低;所述滑动支撑件位于滑块与支撑腔室之间,用于支撑滑块在支撑腔室内滑动,通过滑动支撑件平衡所述滑块受到的随机力。本发明提供的晶圆承载座的升降系统解决了波纹管产生的随机力造成升降装置结构不稳定、丝杠形变等问题。
Lifting system of wafer bearing seat
一种晶圆承载座的升降系统
2023-06-06
Patent
Electronic Resource
Chinese
IPC: | H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last |
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