The invention relates to the technical field of semiconductors, and provides a transfer device which comprises a base; the mechanical arm is arranged on the base, and a clamping space used for grabbing a workpiece is formed in the mechanical arm; and the fixing assembly is arranged on the mechanical arm, the fixing assembly comprises a telescopic part, the telescopic part is arranged in a telescopic mode relative to the mechanical arm, and a circumferential closed space used for wrapping the workpiece is formed in the telescopic part and used for fixing the workpiece. The workpiece is clamped through the clamping space of the mechanical arm, secondary fixing of the workpiece is achieved through the telescopic piece of the fixing assembly, and on the basis that efficient workpiece carrying is guaranteed, the workpiece carrying stability can be guaranteed.
本公开涉及半导体技术领域,提出了一种转运设备,包括:基座;机械臂,机械臂设置于基座,机械臂形成有用于抓取工件的夹持空间;固定组件,固定组件设置于机械臂,固定组件包括伸缩件,伸缩件相对于机械臂可伸缩地设置,且伸缩件形成有用于包裹工件的周向封闭空间,以用于固定工件。通过机械臂的夹持空间实现对工件的夹持,并依靠固定组件的伸缩件实现对工件的二次固定,在保证高效搬运工件的基础上,可以保证工件的搬运稳定性。
Transfer equipment
转运设备
2023-04-28
Patent
Electronic Resource
Chinese
IPC: | B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last |