The invention belongs to the technical field of semiconductor manufacturing, and particularly relates to semiconductor manufacturing equipment for technology development, which comprises a supporting seat, a supporting plate is fixed on the surface of the supporting seat through bolts, a hydraulic rod is fixedly mounted on the side surface of the supporting plate, stand columns are fixedly connected to the front side and the rear side of the supporting seat, and a top plate is fixedly mounted at the tops of the stand columns. A connecting block is fixedly installed above the hydraulic rod, a first motor is fixedly connected to the interior of the connecting block, a rotating shaft is fixedly installed on an output shaft of the first motor, a fixing cylinder is fixedly connected to the top of the rotating shaft, a first electric push rod is rotatably installed on the surface of the fixing cylinder, and a shell is connected to the front end of the first electric push rod; a traction assembly is installed between the shell and the first electric push rod, and a clamping plate is installed in the shell. According to the device, sputtering residues can be shielded after redundant parts at the tops of the silicon ingots are cut off, meanwhile, the silicon ingots can be automatically and transversely placed when the positions of the silicon ingots are moved, and the manufacturing efficiency of semiconductors is improved.
本发明公开的属于半导体制造技术领域,具体为一种技术开发用半导体制造设备,包括支撑座,所述支撑座的表面螺栓固定有支撑板,支撑板的侧面固定安装有液压杆,撑座的前后两侧固定连接有立柱,立柱的顶部固定安装有顶板,液压杆的上方固定安装有连接块,连接块的内部固定连接有第一电机,第一电机的输出轴上固定安装有转轴,转轴的顶部固定连接有固定筒,固定筒的表面转动安装有第一电动推杆,第一电动推杆的前端连接有外壳,外壳和第一电动推杆之间安装有牵引组件,外壳的内部安装有夹板;该装置能够在截断硅锭顶部多余部分后对溅射的残留物进行遮挡,同时能够在移动硅锭的位置时自动横置硅锭,提升了半导体的制作效率。
Semiconductor manufacturing equipment for technology development
一种技术开发用半导体制造设备
2023-04-04
Patent
Electronic Resource
Chinese
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