The invention relates to a vacuum isolation cabin door and a using method thereof.The vacuum isolation cabin door comprises a box body, a valve plate and a first driving mechanism, end face flanges are arranged on the two sides of the box body and connected with vacuum pipelines in a sealed mode respectively, the two vacuum pipelines are coaxially arranged, protruding blocks are arranged at the top and the bottom of the valve plate respectively, and a sliding groove is formed in the box body; the first driving mechanism drives the valve plate to slide in the box body, the plate face of the valve plate can move to or be away from the position between the two vacuum pipelines, a sealing end face is arranged in the box body, a second driving mechanism is arranged on the plate face of one side of the valve plate, and the second driving mechanism is connected with the sealing door. An end face sealing ring and a spring are arranged on the sealing door, the two ends of the spring act on the sealing door and the air cylinder or the hydraulic cylinder respectively, the spring is installed in a pre-compression mode, and the sealing end face and the sealing door are matched to form a sealing structure. The device is simple in structure, convenient to use and good in effect.
本发明关于一种真空隔离舱门及其使用方法,该真空隔离舱门包括箱体、阀板和第一驱动机构,箱体两侧设有端面法兰分别与真空管道密封连接,两个真空管道同轴设置,阀板的顶部和底部分别设置有凸块,箱体内设有滑槽,凸块设置在滑槽内,配合成滑动导向副,第一驱动机构驱动阀板在箱体内滑动,阀板的板面能够移动至或者远离两个真空管道之间,箱体内设有密封端面,阀板一侧的板面上设有第二驱动机构,第二驱动机构连接密封门,密封门上设有端面密封圈和弹簧,弹簧的两端分别作用在密封门和气缸或液压缸上,弹簧预压缩安装,密封端面与密封门相互配合形成密封结构。本发明结构简单,使用方便,效果良好。
Vacuum isolation cabin door and using method thereof
一种真空隔离舱门及其使用方法
2022-11-22
Patent
Electronic Resource
Chinese
European Patent Office | 2022
|Self-adaptive sealing structure cabin door suitable for square vacuum cabin and operation method
European Patent Office | 2023
|European Patent Office | 2023
|