The invention relates to a sealing door and a vacuum isolation cabin door, the sealing door is provided with an end face sealing ring, a radial sealing ring and at least one first through hole, the end face sealing ring is arranged on one side of the sealing door, the radial sealing ring is arranged on the outer ring face of the sealing door, and the first through hole is communicated with the two sides of the sealing door; the outer ring face of the sealing door is in sliding fit in the mounting hole of the valve plate, the radial sealing ring is tightly attached to the mounting hole, and the end face sealing ring is used for being attached to the sealing end face. According to the vacuum isolation cabin door, in the process from closing to opening or from opening to closing, the sealing door is through in the front-back direction, and the pressure difference of the two vacuum pipelines directly acts on the valve plate instead of acting on the sealing door, so that the force for opening and closing the sealing door is small, that is, the sealing door can be pushed by adopting a driving part with small driving force, and the sealing door can be conveniently opened and closed. The manufacturing cost of the sealing door, the driving component and the valve plate can be reduced, and the sealing door is simple in structure, convenient to use and good in effect.
本发明关于一种密封门及真空隔离舱门,该密封门上设置有端面密封圈、径向密封圈和至少一个第一通孔,端面密封圈设置于密封门的一侧,径向密封圈设置于密封门的外环面上,第一通孔连通密封门的两侧,密封门的外环面滑动配合于阀板的安装孔中,径向密封圈紧贴于安装孔,端面密封圈用于贴合密封端面。本发明真空隔离舱门在由关闭到开启或者由开启到关闭的过程中,所述密封门前后贯通,两个所述真空管道的压差直接作用在所述阀板上,而非作用在密封门上,使得启闭密封门的力较小,即采用较小驱动力的驱动部件即可推动密封门,使端面密封圈靠近或远离密封端面,可降低密封门、驱动部件、阀板的造价,该密封门结构简单,使用方便,效果良好。
Sealing door and vacuum isolation cabin door
一种密封门及真空隔离舱门
2022-11-04
Patent
Electronic Resource
Chinese
European Patent Office | 2022
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