The present disclosure provides a lifting device, shifting equipment and chamber equipment for lifting an object with respect to a reference object. The lifting device comprises a support table formed with a receiving hole in which the object is held; a motor, which is fixed relative to the support table or the reference object; and at least one pair of lifting assemblies. Each lifting assembly comprises a nut fixed to the reference object; and a lead screw which is vertically connected between the nut and the support table. The upper end of the lead screw is in driving connection with the motor through a transmission mechanism which is in synchronous transmission between the lead screw and the motor, the transmission mechanism is in a belt transmission mechanism or chain transmission structure mode, and a lead screw nut pair is formed between the lower portion of the lead screw and the nut; and the lifting device further comprises at least one locking assembly, and the at least one locking assembly is arranged to be connected with the lead screws of the at least one pair of lifting assemblies and is configured to only allow the lead screws to rotate in the single direction.
本公开提供用于相对于参照物提升物体的升降装置,移位设备以及腔室设备,所述升降装置包括:支撑台,形成有容纳孔,所述物体由所述容纳孔保持;电机,相对于所述支撑台或所述参照物固定;和至少一对升降组件。每个升降组件包括:螺母,固定至所述参照物;和竖直地联接于所述螺母与所述支撑台之间的丝杠。所述丝杠的上端与所述电机经由二者之间同步传动的传动机构而彼此成驱动连接,所述传动机构呈带传动机构或链传动结构的形式,所述丝杠的下部与所述螺母之间形成丝杠螺母副;且所述升降装置还包括至少一个锁止组件,所述至少一个锁止组件安置成分别与至少一对升降组件的丝杠联接且被配置成仅允许丝杠单向转动。
Lifting device, positioning equipment and chamber equipment
升降装置、定位设备和腔室设备
2021-06-15
Patent
Electronic Resource
Chinese
IPC: | B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / F16H Getriebe , GEARING / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES |
Positioning and braking device of cargo lifting equipment
European Patent Office | 2021
|Lifting equipment for high-precision positioning occasion and using method of lifting equipment
European Patent Office | 2025
|Lifting positioning device and vehicle assembling equipment with same
European Patent Office | 2022
|Positioning method of lifting hook, processor, lifting equipment and storage medium
European Patent Office | 2022
|