The invention discloses a vacuum pumping system of test equipment of ion thrusters. Through the adoption of the vacuum pumping system disclosed by the invention, a vacuum environment can be provided for the ground test equipment of the ion thrusters, and the special requirements that the ground test equipment of the ion thrusters is oil-free vacuum, is large in pumping capability, prevents sputtering, has a plasma-protection function, and is high in reliability are met. The vacuum pumping system disclosed by the invention comprises a vacuum pumping device of a main chamber vacuum container, and a vacuum pumping device of an accessory chamber vacuum container, wherein the vacuum pumping device of the main chamber vacuum container comprises a coarse pumping assembly of the main chamber vacuum container, a transition pumping assembly of the main chamber vacuum container, and a high vacuum sucking assembly of the main chamber vacuum container. Firstly, the main chamber vacuum container is pumped to 10Pa by using the coarse pumping assembly of the main chamber vacuum container; then, the main chamber vacuum container is pumped to 10-2Pa by using the transition pumping assembly of the main chamber vacuum container; finally, when the main chamber vacuum container is pumped to below 1.0*10-4Pa by using the high vacuum sucking assembly of the main chamber vacuum container, a test is started.
Vacuum pumping system of test equipment of ion thrusters
2015-10-28
Patent
Electronic Resource
English
IPC: | B64G Raumfahrt , COSMONAUTICS |
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