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    Title :

    Augen und Arme der Mikroelektronik. Neue Fertigungsmethoden miniaturisieren Sensoren und Aktoren


    Additional title:

    New manufacturing measures miniaturize sensors and actors.


    Published in:

    Publication date :

    1995


    Size :

    3 pages


    Remarks:

    Fluid Z.f.Hydraul.u.Pneum.;29(1995)1/2;52-57


    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    German