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    Title :

    Silicon microstructures:merging mechanics with electronics


    Additional title:

    Siliziummikrostrukturen:Ein Verschmelzen der Mechanik mit der Elektronik.


    Contributors:

    Publication date :

    1992


    Size :

    10 pages


    Remarks:

    SAE-Paper;920472;1992;Sensors and Actuators 1992;SAE Spec. Publ.; SP-903


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English