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    Title :

    Cyclic Oxidation of advanced silicon nitrides


    Additional title:

    Zyklische Oxidation von modernen Siliziumnitriden.



    Publication date :

    1991


    Size :

    8 pages


    Remarks:

    SAE-Paper; 1991;Proc.of the Annual Automotive Technology Development Contractors Coordination Meeting;SAE Proc.; P-243


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



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