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    Title :

    Reliability of resonant micromachined sensors and actuators


    Additional title:

    Die Zuverlaessigkeit von mikrosystemtechnischen Resonanz-Sensoren und Aktuatoren.


    Contributors:

    Publication date :

    2001


    Size :

    8 pages


    Remarks:

    SAE-Paper;2001-01-0618;2001;Sensors and Actuators 2001;SAE Spec.Publ.; SP-1609


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    Reliability of Resonant Micromachined Sensors and Actuators

    Sparks, D. / Chia, M. / Zarabadi, S. | SAE Technical Papers | 2001


    2001-01-0618 Reliability of Resonant Micromachined Sensors and Actuators

    Sparks, D. / Chia, M. / Zarabadi, S. et al. | British Library Conference Proceedings | 2001


    Micromachined Sensors and Actuators Based on Bent-Beam Suspensions

    Gianchandani, Y. B. | British Library Conference Proceedings | 1999


    Micromachined resonant gyroscope [5253-26]

    Qiu, A. / Wang, S. / Zhou, B. et al. | British Library Conference Proceedings | 2003


    Micromachined fiber optic sensors

    Culshaw, Brian | SPIE | 1993