Reliability of resonant micromachined sensors and actuators
Die Zuverlaessigkeit von mikrosystemtechnischen Resonanz-Sensoren und Aktuatoren.
2001
8 pages
SAE-Paper;2001-01-0618;2001;Sensors and Actuators 2001;SAE Spec.Publ.; SP-1609
Miscellaneous
English
Reliability of Resonant Micromachined Sensors and Actuators
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