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    Title :

    Experimental Study on Cylindrical Resonant Cavity Used in Surface Wave Plasma Source


    Contributors:
    Yang, Juan (author) / Jin, Yizhou (author) / Wang, Yang (author) / Ma, Yanjie (author)

    Published in:

    Publication date :

    2013-05-01




    Type of media :

    Article (Journal)


    Type of material :

    Electronic Resource


    Language :

    English





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