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    Title :

    A review of ion bombardment effects during the growth of thin film semiconductors by sputter deposition


    Contributors:
    GREENE, J. (author)

    Conference:

    13th Fluid and PlasmaDynamics Conference ; 1980 ; Snowmass , CO , U.S.A.



    Publication date :

    1980-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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