Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    A review of ion bombardment effects during the growth of thin film semiconductors by sputter deposition


    Beteiligte:
    GREENE, J. (Autor:in)

    Kongress:

    13th Fluid and PlasmaDynamics Conference ; 1980 ; Snowmass , CO , U.S.A.



    Erscheinungsdatum :

    01.01.1980



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




    Azimuthal Differential Sputter Yields of Molybdenum by Low Energy Xe+ Bombardment

    Yalin, A. / Williams, J. / Zoerb, K. et al. | British Library Conference Proceedings | 2006


    Azimuthal Differential Sputter Yields of Molybdenum by Low Energy Xe+ Bombardment

    Yalin, Azer / Williams, John / Zoerb, Kirk et al. | AIAA | 2006


    Sputter deposition onto plastics

    Thornton, J. | Tema Archiv | 1975


    Calculation of Boron Nitride Sputter Yields Under Low Energy Xenon Ion Bombardment

    Yim, John / Falk, Michael / Keidar, Michael et al. | AIAA | 2007


    Effects of MeV proton bombardment in thin film PFA and FEP polymers

    Parada, Marco A. / de Almeida, A. / Muntele, C. et al. | Tema Archiv | 2005