Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Silicon nanostructuring by Ag ions implantation through nanosphere lithography mask


    Contributors:

    Published in:

    Optical materials ; 88 ; 508-515


    Publication date :

    2019-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    535



    Absorption enhancement in nanostructured silicon fabricated by self-assembled nanosphere lithography

    Li, Qiang / Gao, Jinsong / Li, Zizheng et al. | British Library Online Contents | 2017


    2D Photonic Crystal Structures Fabricated by Nanosphere Lithography

    Zhibiao Hao, / Shuo Han, / Jian Wang, et al. | IEEE | 2005



    Holographic lithography needs no mask

    Nole, J. | British Library Online Contents | 1997


    Nanostructuring repairs lithographic masks

    British Library Online Contents | 2000