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    Title :

    High-aspect-ratio nanoimprinted structures for a multi-pole magnetic scale


    Contributors:
    Xu, Z. H. (author) / Wu, C. L. (author) / Sung, C. K. (author) / Wang, S. C. (author) / Chin, T. S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 1949-1953


    Publication date :

    2014-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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