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    Title :

    Fabrication of high aspect ratio comb-drive actuator using deep X-ray lithography at Indus-2


    Contributors:
    Shukla, R. (author) / Dhamgaye, V. P. (author) / Jain, V. K. (author) / Ram Sankar, P. (author) / Mukherjee, C. (author) / Pant, B. D. (author) / Lodha, G. S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 7 ; 1273-1280


    Publication date :

    2014-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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