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    Title :

    Electrostatically actuated FGM micro-tweezer under the thermal moment


    Contributors:
    Rezaee, M. (author) / Sharafkhani, N. (author) / Chitsaz, A. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 11 ; 1829-1837


    Publication date :

    2013-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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