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    Title :

    Challenges in fabrication and testing of piezoelectric MEMS with a particular focus on energy harvesters


    Contributors:
    Rezaei, M. (author) / Lueke, J. (author) / Raboud, D. (author) / Moussa, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 8 ; 1195-1219


    Publication date :

    2013-01-01


    Size :

    25 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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