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    Title :

    Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters


    Contributors:
    Md Ralib, A. A. (author) / Nordin, A. N. (author) / Salleh, H. (author) / Othman, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 11 ; 1761-1769


    Publication date :

    2012-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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