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    Title :

    Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure time


    Contributors:
    Horade, M. (author) / Sugiyama, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 3 ; 351-356


    Publication date :

    2013-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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    Kishihara, M. / Ukita, Y. / Utsumi, Y. et al. | British Library Online Contents | 2008


    3-D PTFE microstructure fabricated using synchrotoron radiation etching

    Horade, M. / Khumpuang, S. / Sugiyama, S. | British Library Online Contents | 2008



    Magnetron plasma etching of SiC for microstructures [2686-10]

    Beheim, G. / Salupo, C. / SPIE | British Library Conference Proceedings | 1996


    PTFE-Wellendichtringe

    Hoffmann,C. / Mueller,H.K. / Haas,W. et al. | Automotive engineering | 1995