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    Title :

    CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars


    Contributors:
    Yao, T. F. (author) / Yang, S. Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 2 ; 151-157


    Publication date :

    2013-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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