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    Title :

    Development of two step carbon dioxide assisted thermal fusion PMMA bonding process


    Contributors:
    Wu, C. L. (author) / Li, C. C. (author) / Lu, C. F. (author) / Yang, S. Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 4 ; 409-414


    Publication date :

    2012-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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