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    Title :

    A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry


    Contributors:
    Zhao, J. M. (author) / Yang, P. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 9/10 ; 1455-1461


    Publication date :

    2012-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83





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