Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications


    Contributors:
    Pabst, O. (author) / Schiffer, M. (author) / Obermeier, E. (author) / Tekin, T. (author) / Lang, K. D. (author) / Ngo, H. D. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 7/8 ; 945-953


    Publication date :

    2012-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




    Young's modulus of polycrystalline Li22Si5

    Ratchford, J.B. | Online Contents | 2011


    Measurement of Young's modulus on thin films under static and dynamic loading conditions [2004-33]

    Brown, G. C. / Pryputniewicz, R. J. / SPIE et al. | British Library Conference Proceedings | 1994



    Measurement of Young's Modulus and Poisson's Ratio of Thermal Barrier Coatings

    Qi, H.-y. / Zhou, L.-z. / Yang, X.-g. | British Library Online Contents | 2005