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    Title :

    The meaning and measure of lateral resolution for surface profiling interferometers


    Contributors:
    de Groot, P. (author) / de Lega, X.C. (author) / Sykora, D. (author) / Deck, L. (author)

    Published in:

    Publication date :

    2012-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.36



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