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    Title :

    Effect of die attachment on key dynamical parameters of micromachined gyroscopes


    Contributors:
    Hou, Z. (author) / Xiao, D. (author) / Wu, X. (author) / Su, J. (author) / Chen, Z. (author) / Zhang, X. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 4 ; 507-513


    Publication date :

    2012-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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    Kooy, J.M.J. | Engineering Index Backfile | 1954