This paper reports a micromachined gyroscope with a 2-DoF sense-mode oscillator that provides a flat region in the sense-mode frequency response curve, where the amplitude and phase of the response are insensitive to parameter fluctuations. The sensitivity is also improved by utilizing dynamical amplification of oscillations in the 2-DoF sense-mode oscillator. Thus, improved long-term stability and robustness to fabrication variations, structural and thermal parameter fluctuations and vacuum degradations are achieved, solely by the mechanical system design. Bulk micromachined prototype gyroscopes exhibited a measured noise-floor of 0.64deg of angle/s/Hz0.5 over a 50 Hz bandwidth at atmospheric pressure. The sense-mode response in the flat operating region was also experimentally demonstrated to be inherently insensitive to pressure, temperature and DC bias variations.


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    Title :

    Robust micromachined gyroscopes for automotive applications


    Additional title:

    Robuste mikrogefertigte Gyroskope für den Einsatz in Kraftfahrzeugen


    Contributors:


    Publication date :

    2005


    Size :

    4 Seiten, 7 Bilder, 2 Quellen



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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