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    Title :

    Study of residual stress-induced deformation of multilayer cantilever for maskless microplasma etching


    Contributors:
    Wen, L. (author) / Yuan, Z. (author) / Cheng, L. (author) / Zeng, H. (author) / Chu, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 1 ; 113-118


    Publication date :

    2012-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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