Study of residual stress-induced deformation of multilayer cantilever for maskless microplasma etching
MICROSYSTEM TECHNOLOGIES ; 18 , 1 ; 113-118
01.01.2012
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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Photoinduced Micron Scale Maskless Etching in Transparent Glasses
British Library Conference Proceedings | 1994
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