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    Title :

    On the tunability of a MEMS based variable capacitor with a novel structure


    Contributors:
    Mobki, H. (author) / Sadeghi, M. H. (author) / Afrang, S. (author) / Rezazadeh, G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 9 ; 1447-1452


    Publication date :

    2011-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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