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    Title :

    Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 8 ; 1381-1391


    Publication date :

    2011-01-01


    Size :

    11 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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