Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances
MICROSYSTEM TECHNOLOGIES ; 17 , 8 ; 1381-1391
01.01.2011
11 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Robust Optimal Design for Worst-Case Tolerances
Online Contents | 1994
|MEMS Gyroscope Lifetime Characterization
NTRS | 2000
|Automated MEMs Gyroscope Characterization
NTRS | 2000
|A New Silicon Rate Gyroscope with Decoupled Oscillation Modes
British Library Conference Proceedings | 1998
|