Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Calcium fluoride micro-optics improve DUV excimer laser systems


    Contributors:
    Wielsch, U. (author) / Kanzler, K. (author) / Lindsey, T. (author)

    Published in:

    LASER FOCUS WORLD ; 47 , 5 ; 89-93


    Publication date :

    2011-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366



    Excimer laser figures optics directly

    British Library Online Contents | 1999


    Beam-shaping optics expand excimer-laser applications

    Masters, A. / Geuking, T. | British Library Online Contents | 2005


    Micro optics for efficient material processing with excimer lasers

    Hutfless, J. / Rebhan, T. / Lutz, N. et al. | British Library Online Contents | 1995


    Micro Optics for Efficient Material Processing with Excimer Lasers

    Hutfless, J. / Rebhan, T. / Lutz, N. et al. | British Library Online Contents | 1994


    ULTRAVIOLET OPTICS All-calcium fluoride system uses 157-nm light

    Webb, J. | British Library Online Contents | 2000