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    Title :

    Low resistive silicon substrate as an etch-stop layer for drilling thick SiO2 by spark assisted chemical engraving (SACE)


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 3 ; 373-380


    Publication date :

    2011-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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