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    Title :

    Fabrication of X-rays mask with carbon membrane for diffraction gratings


    Contributors:
    Takahashi, N. (author) / Tujii, H. (author) / Katori, M. (author) / Yamashita, K. (author) / Noda, D. (author) / Hattori, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 8-9 ; 1303-1307


    Publication date :

    2010-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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