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    Title :

    A microcantilever-based gas flow sensor for flow rate and direction detection


    Contributors:
    Ma, R. H. (author) / Chou, P. C. (author) / Wang, Y. H. (author) / Hsueh, T. H. (author) / Fu, L. M. (author) / Lee, C. Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 8 ; 1201-1205


    Publication date :

    2009-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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