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    Title :

    Micromanipulation system using scanning electron microscope


    Contributors:
    Nakazato, Y. (author) / Yuasa, T. (author) / Sekine, G. (author) / Miyazawa, H. (author) / Jin, M. (author) / Takeuchi, S. (author) / Ariga, Y. (author) / Murakawa, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 6 ; 859-864


    Publication date :

    2009-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83





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