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    Title :

    Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology


    Contributors:
    Shibata, T. (author) / Takahashi, Y. (author) / Kawashima, T. (author) / Kubota, T. (author) / Mita, M. (author) / Mineta, T. (author) / Makino, E. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1359-1365


    Publication date :

    2008-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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