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    Title :

    Nickel stamp fabrication and hot embossing for mass-production of micro/nano combined structures using anodic aluminum oxide


    Contributors:
    Park, J. M. (author) / Kim, N. H. (author) / Lee, B. K. (author) / Lee, K. H. (author) / Kwon, T. H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1689-1694


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83





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