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    Title :

    Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication


    Contributors:
    Worgull, M. (author) / Hétu, J. F. (author) / Kabanemi, K. K. (author) / Heckele, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 10-11 ; 947-952


    Publication date :

    2006-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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