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    Title :

    Replication of nanostructures on microstructures by intermediate film mold inserted hot embossing process


    Contributors:
    Lee, H. S. (author) / Kwon, T. H. (author) / Kim, J. H. (author) / Chang, S. S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 8 ; 1149-1155


    Publication date :

    2008-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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