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    Title :

    Design and fabrication of the suspended high-Q spiral inductors with X-beams


    Contributors:
    Hsieh, M. C. (author) / Jair, D. K. (author) / Lin, C. S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 7 ; 903-907


    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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