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    Title :

    Silicon on nothing MEMS electromechanical resonator


    Contributors:
    Durand, C. d. (author) / Casset, F. (author) / Ancey, P. (author) / Judong, F. (author) / Talbot, A. (author) / Quenouillère, R. m. (author) / Renaud, D. (author) / Borel, S. p. (author) / Florin, B. (author) / Buchaillot, L. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 7 ; 1027-1033


    Publication date :

    2008-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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