Silicon on nothing MEMS electromechanical resonator
MICROSYSTEM TECHNOLOGIES ; 14 , 7 ; 1027-1033
01.01.2008
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Optimization of an Electromechanical Helmholtz Resonator
AIAA | 2006
|Electromechanical model of RF MEMS switches
British Library Online Contents | 2003
|Controlling Micro ElectroMechanical Systems (MEMS) in Space
British Library Conference Proceedings | 2003
|Potential Micro-Electromechanical (MEMS) Applications in Civil Engineering
British Library Conference Proceedings | 2000
|