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    Title :

    Three-dimensional simulation of sacrificial etching


    Contributors:
    Cervenka, J. (author) / Ceric, H. (author) / Selberherr, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 4-5 ; 665-671


    Publication date :

    2008-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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