Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Etching behaviour of sputter-deposited aluminium nitride thin films in H3PO4 and KOH solutions


    Contributors:
    Ababneh, A. (author) / Kreher, H. (author) / Schmid, U. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 4-5 ; 567-573


    Publication date :

    2008-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83