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    Title :

    Imprint lithography challenges EUV for next-generation chip manufacturing


    Contributors:
    Kincade, K. (author)

    Published in:

    LASER FOCUS WORLD ; 43 , 7 ; 97-104


    Publication date :

    2007-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366



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