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    Title :

    Thermally Induced Error Analysis for the Imprint Spindle of High-Precision Imprint Lithography Tools


    Contributors:
    Le, Y. (author) / Bingheng, L. (author) / Yucheng, D. (author)

    Published in:

    Publication date :

    2004-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    500



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