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    Title :

    Process conditions in X-ray lithography for the fabrication of devices with sub-micron feature sizes


    Contributors:
    Mappes, T. (author) / Achenbach, S. (author) / Mohr, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 355-360


    Publication date :

    2007-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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